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ScienceNov 28, 2024 10:56 AM

Hitachi High-Tech Launches DCR Etch System 9060 Series, Supporting Isotropic Etching of Advanced 3D ...

TOKYO, Nov 28, 2024 - (JCN Newswire) - - Hitachi (OTC:HTHIY) High-Tech Corporation ("Hitachi High-Tech") announced today the launch of its DCR(1) Etch System 9060Series. This system, which leverages Hitachi High-Tech's plasma etching(2) technology and expertise, has been developed to achieve precise control over the horizontal (isotropic) etching process in dry environments, aimed at applications such as the high-aspect(3) three-dimensional structures used in advanced semiconductor devices. W ...Read More >

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